Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry
This Open Access book discusses an extension to low-coherence interferometry by dispersion-encoding. The approach is theoretically designed and implemented for applications such as surface profilometry, polymeric cross-linking estimation and the determination of thin-film layer thicknesses. During a...
-д хадгалсан:
| Үндсэн зохиолч: | |
|---|---|
| Формат: | Online |
| Хэл сонгох: | англи |
| Хэвлэсэн: |
Springer Nature
2021
|
| Нөхцлүүд: | |
| Онлайн хандалт: | ONIX_20211213_9783658359263_14 |
| Шошгууд: |
Шошго байхгүй, Энэхүү баримтыг шошголох эхний хүн болох!
|
| _version_ | 1869514907085438976 |
|---|---|
| author | Taudt, Christopher |
| author_browse | Taudt, Christopher |
| author_facet | Taudt, Christopher |
| author_sort | Taudt, Christopher |
| collection | Directory of Open Access Books |
| description | This Open Access book discusses an extension to low-coherence interferometry by dispersion-encoding. The approach is theoretically designed and implemented for applications such as surface profilometry, polymeric cross-linking estimation and the determination of thin-film layer thicknesses. During a characterization, it was shown that an axial measurement range of 79.91 µm with an axial resolution of 0.1 nm is achievable. Simultaneously, profiles of up to 1.5 mm in length were obtained in a scan-free manner. This marked a significant improvement in relation to the state-of-the-art in terms of dynamic range. Also, the axial and lateral measurement range were decoupled partially while functional parameters such as surface roughness were estimated. The characterization of the degree of polymeric cross-linking was performed as a function of the refractive index. It was acquired in a spatially-resolved manner with a resolution of 3.36 x 10-5. This was achieved by the development of a novel mathematical analysis approach. |
| format | Online |
| id | doab-20.500.12854ir-74907 |
| institution | Directory of Open Access Books |
| language | eng |
| publishDate | 2021 |
| publishDateRange | 2021 |
| publishDateSort | 2021 |
| publisher | Springer Nature |
| publisherStr | Springer Nature |
| record_format | ojs |
| spelling | doab-20.500.12854ir-749072025-07-30T11:55:57Z Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry Taudt, Christopher surface metrology profilometry interferometry low-coherence interferometry semiconductor manufacturing optical metrology Open Access thema EDItEUR::P Mathematics and Science::PH Physics::PHJ Optical physics thema EDItEUR::P Mathematics and Science::PD Science: general issues::PDD Scientific standards, measurement etc thema EDItEUR::P Mathematics and Science::PH Physics::PHJ Optical physics thema EDItEUR::P Mathematics and Science::PD Science: general issues::PDD Scientific standards, measurement etc This Open Access book discusses an extension to low-coherence interferometry by dispersion-encoding. The approach is theoretically designed and implemented for applications such as surface profilometry, polymeric cross-linking estimation and the determination of thin-film layer thicknesses. During a characterization, it was shown that an axial measurement range of 79.91 µm with an axial resolution of 0.1 nm is achievable. Simultaneously, profiles of up to 1.5 mm in length were obtained in a scan-free manner. This marked a significant improvement in relation to the state-of-the-art in terms of dynamic range. Also, the axial and lateral measurement range were decoupled partially while functional parameters such as surface roughness were estimated. The characterization of the degree of polymeric cross-linking was performed as a function of the refractive index. It was acquired in a spatially-resolved manner with a resolution of 3.36 x 10-5. This was achieved by the development of a novel mathematical analysis approach. 2021-12-14T04:02:45Z 2021-12-14T04:02:45Z 2021-12-13T18:55:18Z 2022 book ONIX_20211213_9783658359263_14 OCN: 1294663434 https://library.oapen.org/handle/20.500.12657/51931 9783658359263 https://directory.doabooks.org/handle/20.500.12854/74907 eng open access image/jpeg image/jpeg image/jpeg n/a n/a n/a https://library.oapen.org/bitstream/20.500.12657/51931/1/978-3-658-35926-3.pdf https://library.oapen.org/bitstream/20.500.12657/51931/1/978-3-658-35926-3.pdf https://library.oapen.org/bitstream/20.500.12657/51931/1/978-3-658-35926-3.pdf Springer Nature Springer Vieweg 10.1007/978-3-658-35926-3 10.1007/978-3-658-35926-3 9fa3421d-f917-4153-b9ab-fc337c396b5a 920b9b3b-c6db-4103-995b-d5f9c918d5d2 29964b97-7084-4a33-8a04-1d460fcd4895 9783658359263 Springer Vieweg 163 Bern [grantnumber unknown] [grantnumber unknown] open access |
| spellingShingle | surface metrology profilometry interferometry low-coherence interferometry semiconductor manufacturing optical metrology Open Access thema EDItEUR::P Mathematics and Science::PH Physics::PHJ Optical physics thema EDItEUR::P Mathematics and Science::PD Science: general issues::PDD Scientific standards, measurement etc thema EDItEUR::P Mathematics and Science::PH Physics::PHJ Optical physics thema EDItEUR::P Mathematics and Science::PD Science: general issues::PDD Scientific standards, measurement etc Taudt, Christopher Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry |
| title | Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry |
| title_full | Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry |
| title_fullStr | Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry |
| title_full_unstemmed | Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry |
| title_short | Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry |
| title_sort | development and characterization of a dispersion encoded method for low coherence interferometry |
| topic | surface metrology profilometry interferometry low-coherence interferometry semiconductor manufacturing optical metrology Open Access thema EDItEUR::P Mathematics and Science::PH Physics::PHJ Optical physics thema EDItEUR::P Mathematics and Science::PD Science: general issues::PDD Scientific standards, measurement etc thema EDItEUR::P Mathematics and Science::PH Physics::PHJ Optical physics thema EDItEUR::P Mathematics and Science::PD Science: general issues::PDD Scientific standards, measurement etc |
| topic_facet | surface metrology profilometry interferometry low-coherence interferometry semiconductor manufacturing optical metrology Open Access thema EDItEUR::P Mathematics and Science::PH Physics::PHJ Optical physics thema EDItEUR::P Mathematics and Science::PD Science: general issues::PDD Scientific standards, measurement etc thema EDItEUR::P Mathematics and Science::PH Physics::PHJ Optical physics thema EDItEUR::P Mathematics and Science::PD Science: general issues::PDD Scientific standards, measurement etc |
| url | ONIX_20211213_9783658359263_14 |
| work_keys_str_mv | AT taudtchristopher developmentandcharacterizationofadispersionencodedmethodforlowcoherenceinterferometry |