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Manufacturing Metrology

Metrology is the science of measurement, which can be divided into three overlapping activities: (1) the definition of units of measurement, (2) the realization of units of measurement, and (3) the traceability of measurement units. Manufacturing metrology originally implicates the measurement of co...

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Format: Online
Language:English
Published: MDPI - Multidisciplinary Digital Publishing Institute 2022
Subjects:
white light interference
laser interference
surface positioning
end-plate surface distance measurement
spherical diamond wheel
diamond roller
form truing
in-situ measurements
topography measurement
differential measurement system
modular design
confocal sensor
film interferometry
over-constrained mechanism
geometric deviations
multi-tasking machine tools
identification method
squareness of translational axes
metrology
step gauge
length calibration
multi-path laser synthesis technology
measurement mechanism
machine tool
surface shape contour
on-site measurement
positional relation
scanless 3D imaging
compressed sensing
depth detection
single-pixel detector
blade tip timing
circumferential Fourier fit
synchronous vibration
optical angle sensor
mode-locked femtosecond laser
optical frequency comb
laser autocollimation
diffraction grating
absolute angle measurement
nonlinear optics
second harmonic generation
aeroengine blade
blade twist
measurement and evaluation
a priori planning
geometric analysis
automated optical inspection
precision measurement
circular contour
edge detection
measurement system analysis
coordinate measuring machine
reproducibility
GD&amp
T
quality
measurement uncertainty
precision metrology
form measurement
stitching linear-scan method
roundness measurement
Monte Carlo method
single point diamond tool
cutting edge radius
reversal method
nanoindentation system
elastic recovery
surface charge distribution
point probing characteristics
spherical scattering electrical field probe
miniature internal structures
high aspect ratios
circulating cooling water
dynamic thermal filtering
precision manufacturing
quick response
temperature stability
thermal management
dual-axis level
light refraction
light transmission
angle measurement
differential Fabry–Pérot interferometer
homodyne interferometer
nonlinearity error
linear displacement
chromatic confocal probe
femtosecond laser
off-axis differential method
tracking local minimum method
laser triangulation displacement sensor (LTDS)
dispensing robot
location system
actual laser imaging waveform
centroid difference
repeatability accuracy
dynamic response speed
absolute distance measurement
system error correction
surface texture measurement
confocal sensing
surface form tracing
3D reconstruction
roughness
in-process
metrology for machining
optical coherence tomography
wafer die
defect detection
generative adversarial network (GAN)
you only look once version 3 (YOLOv3)
pad dressing
dynamic measurement
CMP
pad uniformity
pad lifetime
n/a
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology
Online Access:ONIX_20220706_9783036529868_9
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