Manufacturing Metrology

Metrology is the science of measurement, which can be divided into three overlapping activities: (1) the definition of units of measurement, (2) the realization of units of measurement, and (3) the traceability of measurement units. Manufacturing metrology originally implicates the measurement of co...

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Bibliographic Details
Format:	Online
Language:	English
Published:	MDPI - Multidisciplinary Digital Publishing Institute 2022
Subjects:	white light interference laser interference surface positioning end-plate surface distance measurement spherical diamond wheel diamond roller form truing in-situ measurements topography measurement differential measurement system modular design confocal sensor film interferometry over-constrained mechanism geometric deviations multi-tasking machine tools identification method squareness of translational axes metrology step gauge length calibration multi-path laser synthesis technology measurement mechanism machine tool surface shape contour on-site measurement positional relation scanless 3D imaging compressed sensing depth detection single-pixel detector blade tip timing circumferential Fourier fit synchronous vibration optical angle sensor mode-locked femtosecond laser optical frequency comb laser autocollimation diffraction grating absolute angle measurement nonlinear optics second harmonic generation aeroengine blade blade twist measurement and evaluation a priori planning geometric analysis automated optical inspection precision measurement circular contour edge detection measurement system analysis coordinate measuring machine reproducibility GD&amp T quality measurement uncertainty precision metrology form measurement stitching linear-scan method roundness measurement Monte Carlo method single point diamond tool cutting edge radius reversal method nanoindentation system elastic recovery surface charge distribution point probing characteristics spherical scattering electrical field probe miniature internal structures high aspect ratios circulating cooling water dynamic thermal filtering precision manufacturing quick response temperature stability thermal management dual-axis level light refraction light transmission angle measurement differential Fabry–Pérot interferometer homodyne interferometer nonlinearity error linear displacement chromatic confocal probe femtosecond laser off-axis differential method tracking local minimum method laser triangulation displacement sensor (LTDS) dispensing robot location system actual laser imaging waveform centroid difference repeatability accuracy dynamic response speed absolute distance measurement system error correction surface texture measurement confocal sensing surface form tracing 3D reconstruction roughness in-process metrology for machining optical coherence tomography wafer die defect detection generative adversarial network (GAN) you only look once version 3 (YOLOv3) pad dressing dynamic measurement CMP pad uniformity pad lifetime n/a thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology
Online Access:	ONIX_20220706_9783036529868_9
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Manufacturing Metrology

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