Manufacturing Metrology

Metrology is the science of measurement, which can be divided into three overlapping activities: (1) the definition of units of measurement, (2) the realization of units of measurement, and (3) the traceability of measurement units. Manufacturing metrology originally implicates the measurement of co...

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Publicat: MDPI - Multidisciplinary Digital Publishing Institute 2022
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collection Directory of Open Access Books
description Metrology is the science of measurement, which can be divided into three overlapping activities: (1) the definition of units of measurement, (2) the realization of units of measurement, and (3) the traceability of measurement units. Manufacturing metrology originally implicates the measurement of components and inputs for a manufacturing process to assure they are within specification requirements. It can also be extended to indicate the performance measurement of manufacturing equipment. This Special Issue covers papers revealing novel measurement methodologies and instrumentations for manufacturing metrology from the conventional industry to the frontier of the advanced hi-tech industry. Twenty-five papers are included in this Special Issue. These published papers can be categorized into four main groups, as follows: Length measurement: covering new designs, from micro/nanogap measurement with laser triangulation sensors and laser interferometers to very-long-distance, newly developed mode-locked femtosecond lasers. Surface profile and form measurements: covering technologies with new confocal sensors and imagine sensors: in situ and on-machine measurements. Angle measurements: these include a new 2D precision level design, a review of angle measurement with mode-locked femtosecond lasers, and multi-axis machine tool squareness measurement. Other laboratory systems: these include a water cooling temperature control system and a computer-aided inspection framework for CMM performance evaluation.
format Online
id doab-20.500.12854ir-87414
institution Directory of Open Access Books
language eng
publishDate 2022
publishDateRange 2022
publishDateSort 2022
publisher MDPI - Multidisciplinary Digital Publishing Institute
publisherStr MDPI - Multidisciplinary Digital Publishing Institute
record_format ojs
spelling doab-20.500.12854ir-874142024-04-09T23:15:55Z Manufacturing Metrology Fan, Kuang-Chao Kinnell, Peter white light interference laser interference surface positioning end-plate surface distance measurement spherical diamond wheel diamond roller form truing in-situ measurements topography measurement differential measurement system modular design confocal sensor film interferometry over-constrained mechanism geometric deviations multi-tasking machine tools identification method squareness of translational axes metrology step gauge length calibration multi-path laser synthesis technology measurement mechanism machine tool surface shape contour on-site measurement positional relation scanless 3D imaging compressed sensing depth detection single-pixel detector blade tip timing circumferential Fourier fit synchronous vibration optical angle sensor mode-locked femtosecond laser optical frequency comb laser autocollimation diffraction grating absolute angle measurement nonlinear optics second harmonic generation aeroengine blade blade twist measurement and evaluation a priori planning geometric analysis automated optical inspection precision measurement circular contour edge detection measurement system analysis coordinate measuring machine reproducibility GD&amp T quality measurement uncertainty precision metrology form measurement stitching linear-scan method roundness measurement Monte Carlo method single point diamond tool cutting edge radius reversal method nanoindentation system elastic recovery surface charge distribution point probing characteristics spherical scattering electrical field probe miniature internal structures high aspect ratios circulating cooling water dynamic thermal filtering precision manufacturing quick response temperature stability thermal management dual-axis level light refraction light transmission angle measurement differential Fabry–Pérot interferometer homodyne interferometer nonlinearity error linear displacement chromatic confocal probe femtosecond laser off-axis differential method tracking local minimum method laser triangulation displacement sensor (LTDS) dispensing robot location system actual laser imaging waveform centroid difference repeatability accuracy dynamic response speed absolute distance measurement system error correction surface texture measurement confocal sensing surface form tracing 3D reconstruction roughness in-process metrology for machining optical coherence tomography wafer die defect detection generative adversarial network (GAN) you only look once version 3 (YOLOv3) pad dressing dynamic measurement CMP pad uniformity pad lifetime n/a thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology Metrology is the science of measurement, which can be divided into three overlapping activities: (1) the definition of units of measurement, (2) the realization of units of measurement, and (3) the traceability of measurement units. Manufacturing metrology originally implicates the measurement of components and inputs for a manufacturing process to assure they are within specification requirements. It can also be extended to indicate the performance measurement of manufacturing equipment. This Special Issue covers papers revealing novel measurement methodologies and instrumentations for manufacturing metrology from the conventional industry to the frontier of the advanced hi-tech industry. Twenty-five papers are included in this Special Issue. These published papers can be categorized into four main groups, as follows: Length measurement: covering new designs, from micro/nanogap measurement with laser triangulation sensors and laser interferometers to very-long-distance, newly developed mode-locked femtosecond lasers. Surface profile and form measurements: covering technologies with new confocal sensors and imagine sensors: in situ and on-machine measurements. Angle measurements: these include a new 2D precision level design, a review of angle measurement with mode-locked femtosecond lasers, and multi-axis machine tool squareness measurement. Other laboratory systems: these include a water cooling temperature control system and a computer-aided inspection framework for CMM performance evaluation. 2022-07-06T11:48:30Z 2022-07-06T11:48:30Z 2022 book ONIX_20220706_9783036529868_9 9783036529868 9783036529875 https://directory.doabooks.org/handle/20.500.12854/87414 eng application/octet-stream Attribution 4.0 International https://mdpi.com/books/pdfview/book/5601 https://mdpi.com/books/pdfview/book/5601 MDPI - Multidisciplinary Digital Publishing Institute 10.3390/books978-3-0365-2987-5 10.3390/books978-3-0365-2987-5 46cabcaa-dd94-4bfe-87b4-55023c1b36d0 9783036529868 9783036529875 414 Basel open access
spellingShingle white light interference
laser interference
surface positioning
end-plate surface distance measurement
spherical diamond wheel
diamond roller
form truing
in-situ measurements
topography measurement
differential measurement system
modular design
confocal sensor
film interferometry
over-constrained mechanism
geometric deviations
multi-tasking machine tools
identification method
squareness of translational axes
metrology
step gauge
length calibration
multi-path laser synthesis technology
measurement mechanism
machine tool
surface shape contour
on-site measurement
positional relation
scanless 3D imaging
compressed sensing
depth detection
single-pixel detector
blade tip timing
circumferential Fourier fit
synchronous vibration
optical angle sensor
mode-locked femtosecond laser
optical frequency comb
laser autocollimation
diffraction grating
absolute angle measurement
nonlinear optics
second harmonic generation
aeroengine blade
blade twist
measurement and evaluation
a priori planning
geometric analysis
automated optical inspection
precision measurement
circular contour
edge detection
measurement system analysis
coordinate measuring machine
reproducibility
GD&amp
T
quality
measurement uncertainty
precision metrology
form measurement
stitching linear-scan method
roundness measurement
Monte Carlo method
single point diamond tool
cutting edge radius
reversal method
nanoindentation system
elastic recovery
surface charge distribution
point probing characteristics
spherical scattering electrical field probe
miniature internal structures
high aspect ratios
circulating cooling water
dynamic thermal filtering
precision manufacturing
quick response
temperature stability
thermal management
dual-axis level
light refraction
light transmission
angle measurement
differential Fabry–Pérot interferometer
homodyne interferometer
nonlinearity error
linear displacement
chromatic confocal probe
femtosecond laser
off-axis differential method
tracking local minimum method
laser triangulation displacement sensor (LTDS)
dispensing robot
location system
actual laser imaging waveform
centroid difference
repeatability accuracy
dynamic response speed
absolute distance measurement
system error correction
surface texture measurement
confocal sensing
surface form tracing
3D reconstruction
roughness
in-process
metrology for machining
optical coherence tomography
wafer die
defect detection
generative adversarial network (GAN)
you only look once version 3 (YOLOv3)
pad dressing
dynamic measurement
CMP
pad uniformity
pad lifetime
n/a
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology
Manufacturing Metrology
title Manufacturing Metrology
title_full Manufacturing Metrology
title_fullStr Manufacturing Metrology
title_full_unstemmed Manufacturing Metrology
title_short Manufacturing Metrology
title_sort manufacturing metrology
topic white light interference
laser interference
surface positioning
end-plate surface distance measurement
spherical diamond wheel
diamond roller
form truing
in-situ measurements
topography measurement
differential measurement system
modular design
confocal sensor
film interferometry
over-constrained mechanism
geometric deviations
multi-tasking machine tools
identification method
squareness of translational axes
metrology
step gauge
length calibration
multi-path laser synthesis technology
measurement mechanism
machine tool
surface shape contour
on-site measurement
positional relation
scanless 3D imaging
compressed sensing
depth detection
single-pixel detector
blade tip timing
circumferential Fourier fit
synchronous vibration
optical angle sensor
mode-locked femtosecond laser
optical frequency comb
laser autocollimation
diffraction grating
absolute angle measurement
nonlinear optics
second harmonic generation
aeroengine blade
blade twist
measurement and evaluation
a priori planning
geometric analysis
automated optical inspection
precision measurement
circular contour
edge detection
measurement system analysis
coordinate measuring machine
reproducibility
GD&amp
T
quality
measurement uncertainty
precision metrology
form measurement
stitching linear-scan method
roundness measurement
Monte Carlo method
single point diamond tool
cutting edge radius
reversal method
nanoindentation system
elastic recovery
surface charge distribution
point probing characteristics
spherical scattering electrical field probe
miniature internal structures
high aspect ratios
circulating cooling water
dynamic thermal filtering
precision manufacturing
quick response
temperature stability
thermal management
dual-axis level
light refraction
light transmission
angle measurement
differential Fabry–Pérot interferometer
homodyne interferometer
nonlinearity error
linear displacement
chromatic confocal probe
femtosecond laser
off-axis differential method
tracking local minimum method
laser triangulation displacement sensor (LTDS)
dispensing robot
location system
actual laser imaging waveform
centroid difference
repeatability accuracy
dynamic response speed
absolute distance measurement
system error correction
surface texture measurement
confocal sensing
surface form tracing
3D reconstruction
roughness
in-process
metrology for machining
optical coherence tomography
wafer die
defect detection
generative adversarial network (GAN)
you only look once version 3 (YOLOv3)
pad dressing
dynamic measurement
CMP
pad uniformity
pad lifetime
n/a
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology
topic_facet white light interference
laser interference
surface positioning
end-plate surface distance measurement
spherical diamond wheel
diamond roller
form truing
in-situ measurements
topography measurement
differential measurement system
modular design
confocal sensor
film interferometry
over-constrained mechanism
geometric deviations
multi-tasking machine tools
identification method
squareness of translational axes
metrology
step gauge
length calibration
multi-path laser synthesis technology
measurement mechanism
machine tool
surface shape contour
on-site measurement
positional relation
scanless 3D imaging
compressed sensing
depth detection
single-pixel detector
blade tip timing
circumferential Fourier fit
synchronous vibration
optical angle sensor
mode-locked femtosecond laser
optical frequency comb
laser autocollimation
diffraction grating
absolute angle measurement
nonlinear optics
second harmonic generation
aeroengine blade
blade twist
measurement and evaluation
a priori planning
geometric analysis
automated optical inspection
precision measurement
circular contour
edge detection
measurement system analysis
coordinate measuring machine
reproducibility
GD&amp
T
quality
measurement uncertainty
precision metrology
form measurement
stitching linear-scan method
roundness measurement
Monte Carlo method
single point diamond tool
cutting edge radius
reversal method
nanoindentation system
elastic recovery
surface charge distribution
point probing characteristics
spherical scattering electrical field probe
miniature internal structures
high aspect ratios
circulating cooling water
dynamic thermal filtering
precision manufacturing
quick response
temperature stability
thermal management
dual-axis level
light refraction
light transmission
angle measurement
differential Fabry–Pérot interferometer
homodyne interferometer
nonlinearity error
linear displacement
chromatic confocal probe
femtosecond laser
off-axis differential method
tracking local minimum method
laser triangulation displacement sensor (LTDS)
dispensing robot
location system
actual laser imaging waveform
centroid difference
repeatability accuracy
dynamic response speed
absolute distance measurement
system error correction
surface texture measurement
confocal sensing
surface form tracing
3D reconstruction
roughness
in-process
metrology for machining
optical coherence tomography
wafer die
defect detection
generative adversarial network (GAN)
you only look once version 3 (YOLOv3)
pad dressing
dynamic measurement
CMP
pad uniformity
pad lifetime
n/a
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues
thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology
url ONIX_20220706_9783036529868_9