Nanomanufacturing

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Bibliografiske detaljer
Format:	Online
Sprog:	EN
Udgivet:	MDPI AG 2023
Fag:	micro- and nanoelectromechanical systems plasma surface engineering plasma etching laser surface engineering 3d nanomanufacturing photonic and plasmonic devices Manufacturing industries HD9720-9975 Plasma engineering. Applied plasma dynamics TA2001-2040
Online adgang:	2673-687X
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