Retroreflex Ellipsometry for Nonplanar Surfaces

Retroreflex ellipsometry addresses the geometric restrictions of conventional ellipsometry by using a retroreflective sheet, which returns the light beam from the sample on the same beam path. Simulation and experiments of retroreflex ellipsometry in two- and three-phase systems have been demonstrat...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Chen, Chia-Wei
Format:	Online
Sprache:	Englisch
Veröffentlicht:	KIT Scientific Publishing 2025
Schlagworte:	Thin-film metrology; Curved surfaces; Ellipsometry; Mueller matrix; Retroreflex ellipsometry; Dünnschicht- Messtechnik; gekrümmte Oberflächen; Ellipsometrie; Müller-Matrix; Retroreflex-Ellipsometrie thema EDItEUR::U Computing and Information Technology::UY Computer science::UYA Mathematical theory of computation::UYAM Maths for computer scientists
Online-Zugang:	https://library.oapen.org/handle/20.500.12657/101571
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