MEMS/NEMS Sensors: Fabrication and Application
Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter change...
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| Үндсэн зохиолчид: | , |
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| Формат: | Online |
| Хэл сонгох: | англи |
| Хэвлэсэн: |
MDPI - Multidisciplinary Digital Publishing Institute
2021
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| Нөхцлүүд: | |
| Онлайн хандалт: | 42715 |
| Шошгууд: |
Шошго байхгүй, Энэхүү баримтыг шошголох эхний хүн болох!
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| _version_ | 1869524330772168704 |
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| author | Koley, Goutam Jahangir, Ifat |
| author_browse | Jahangir, Ifat Koley, Goutam |
| author_facet | Koley, Goutam Jahangir, Ifat |
| author_sort | Koley, Goutam |
| collection | Directory of Open Access Books |
| description | Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors. Despite a long history of development, fabrication of novel MEMS/NEMS devices still poses unique challenges due to their requirement for a suspended geometry; and many new fabrication techniques have been proposed to overcome these challenges. However, further development of these techniques is still necessary, as newer materials such as compound semiconductors, and 2-dimensional materials are finding their way in various MEMS/NEMS applications, with more complex structures and potentially smaller dimensions. |
| format | Online |
| id | doab-20.500.12854ir-53149 |
| institution | Directory of Open Access Books |
| language | eng |
| publishDate | 2021 |
| publishDateRange | 2021 |
| publishDateSort | 2021 |
| publisher | MDPI - Multidisciplinary Digital Publishing Institute |
| publisherStr | MDPI - Multidisciplinary Digital Publishing Institute |
| record_format | ojs |
| spelling | doab-20.500.12854ir-531492024-04-11T15:10:25Z MEMS/NEMS Sensors: Fabrication and Application Koley, Goutam Jahangir, Ifat TA1-2040 T1-995 vibrating ring gyroscope n/a tunnel magnetoresistive effect optical sensor micro-NIR spectrometer pulse inertia force gas sensor wet etching oil detection glass welding spring design power consumption MEMS (micro-electro-mechanical system) back cavity deflection position detector magnetic MEMS single-layer SiO2 frequency tuning threshold accuracy suspended micro hotplate AlGaN/GaN circular HFETs quadrature modulation signal inertial switch nanoparticle sensor low noise photonic crystal nanobeam cavity floating slug infrared image backstepping approach microdroplet acceleration switch microgyroscope temperature uniformity methane microfluidic accelerometer design photonic crystal cavity anisotropy resonant frequency dual-mass MEMS gyroscope analytical model single crystal silicon temperature sensor micro fluidic refractive index sensor microwave measurement low zero-g offset femtosecond laser micropellistor rapid fabrication accelerometer tracking performance GaN diaphragm microactuator resistance parameter optomechanical sensor scanning grating mirror GaAs MMIC adaptive control frequency split frequency mismatch electrostatic force feedback thermoelectric power sensor squeeze-film damping silicon wideband Accelerometer readout bonding strength high temperature pressure sensors 3D simulation level-set method tetramethylammonium hydroxide (TMAH) thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors. Despite a long history of development, fabrication of novel MEMS/NEMS devices still poses unique challenges due to their requirement for a suspended geometry; and many new fabrication techniques have been proposed to overcome these challenges. However, further development of these techniques is still necessary, as newer materials such as compound semiconductors, and 2-dimensional materials are finding their way in various MEMS/NEMS applications, with more complex structures and potentially smaller dimensions. 2021-02-11T19:15:26Z 2021-02-11T19:15:26Z 2019-12-09 16:10:12 2019 book 42715 9783039216352 9783039216345 https://directory.doabooks.org/handle/20.500.12854/53149 eng application/octet-stream Attribution-NonCommercial-NoDerivatives 4.0 International https://mdpi.com/books/pdfview/book/1827 MDPI - Multidisciplinary Digital Publishing Institute 10.3390/books978-3-03921-635-2 10.3390/books978-3-03921-635-2 46cabcaa-dd94-4bfe-87b4-55023c1b36d0 9783039216352 9783039216345 242 open access |
| spellingShingle | TA1-2040 T1-995 vibrating ring gyroscope n/a tunnel magnetoresistive effect optical sensor micro-NIR spectrometer pulse inertia force gas sensor wet etching oil detection glass welding spring design power consumption MEMS (micro-electro-mechanical system) back cavity deflection position detector magnetic MEMS single-layer SiO2 frequency tuning threshold accuracy suspended micro hotplate AlGaN/GaN circular HFETs quadrature modulation signal inertial switch nanoparticle sensor low noise photonic crystal nanobeam cavity floating slug infrared image backstepping approach microdroplet acceleration switch microgyroscope temperature uniformity methane microfluidic accelerometer design photonic crystal cavity anisotropy resonant frequency dual-mass MEMS gyroscope analytical model single crystal silicon temperature sensor micro fluidic refractive index sensor microwave measurement low zero-g offset femtosecond laser micropellistor rapid fabrication accelerometer tracking performance GaN diaphragm microactuator resistance parameter optomechanical sensor scanning grating mirror GaAs MMIC adaptive control frequency split frequency mismatch electrostatic force feedback thermoelectric power sensor squeeze-film damping silicon wideband Accelerometer readout bonding strength high temperature pressure sensors 3D simulation level-set method tetramethylammonium hydroxide (TMAH) thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology Koley, Goutam Jahangir, Ifat MEMS/NEMS Sensors: Fabrication and Application |
| title | MEMS/NEMS Sensors: Fabrication and Application |
| title_full | MEMS/NEMS Sensors: Fabrication and Application |
| title_fullStr | MEMS/NEMS Sensors: Fabrication and Application |
| title_full_unstemmed | MEMS/NEMS Sensors: Fabrication and Application |
| title_short | MEMS/NEMS Sensors: Fabrication and Application |
| title_sort | mems nems sensors fabrication and application |
| topic | TA1-2040 T1-995 vibrating ring gyroscope n/a tunnel magnetoresistive effect optical sensor micro-NIR spectrometer pulse inertia force gas sensor wet etching oil detection glass welding spring design power consumption MEMS (micro-electro-mechanical system) back cavity deflection position detector magnetic MEMS single-layer SiO2 frequency tuning threshold accuracy suspended micro hotplate AlGaN/GaN circular HFETs quadrature modulation signal inertial switch nanoparticle sensor low noise photonic crystal nanobeam cavity floating slug infrared image backstepping approach microdroplet acceleration switch microgyroscope temperature uniformity methane microfluidic accelerometer design photonic crystal cavity anisotropy resonant frequency dual-mass MEMS gyroscope analytical model single crystal silicon temperature sensor micro fluidic refractive index sensor microwave measurement low zero-g offset femtosecond laser micropellistor rapid fabrication accelerometer tracking performance GaN diaphragm microactuator resistance parameter optomechanical sensor scanning grating mirror GaAs MMIC adaptive control frequency split frequency mismatch electrostatic force feedback thermoelectric power sensor squeeze-film damping silicon wideband Accelerometer readout bonding strength high temperature pressure sensors 3D simulation level-set method tetramethylammonium hydroxide (TMAH) thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology |
| topic_facet | TA1-2040 T1-995 vibrating ring gyroscope n/a tunnel magnetoresistive effect optical sensor micro-NIR spectrometer pulse inertia force gas sensor wet etching oil detection glass welding spring design power consumption MEMS (micro-electro-mechanical system) back cavity deflection position detector magnetic MEMS single-layer SiO2 frequency tuning threshold accuracy suspended micro hotplate AlGaN/GaN circular HFETs quadrature modulation signal inertial switch nanoparticle sensor low noise photonic crystal nanobeam cavity floating slug infrared image backstepping approach microdroplet acceleration switch microgyroscope temperature uniformity methane microfluidic accelerometer design photonic crystal cavity anisotropy resonant frequency dual-mass MEMS gyroscope analytical model single crystal silicon temperature sensor micro fluidic refractive index sensor microwave measurement low zero-g offset femtosecond laser micropellistor rapid fabrication accelerometer tracking performance GaN diaphragm microactuator resistance parameter optomechanical sensor scanning grating mirror GaAs MMIC adaptive control frequency split frequency mismatch electrostatic force feedback thermoelectric power sensor squeeze-film damping silicon wideband Accelerometer readout bonding strength high temperature pressure sensors 3D simulation level-set method tetramethylammonium hydroxide (TMAH) thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology |
| url | 42715 |
| work_keys_str_mv | AT koleygoutam memsnemssensorsfabricationandapplication AT jahangirifat memsnemssensorsfabricationandapplication |