MEMS/NEMS Sensors: Fabrication and Application

Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter change...

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書目詳細資料
Main Authors:	Koley, Goutam, Jahangir, Ifat
格式:	Online
語言:	英语
出版:	MDPI - Multidisciplinary Digital Publishing Institute 2021
主題:	TA1-2040 T1-995 vibrating ring gyroscope n/a tunnel magnetoresistive effect optical sensor micro-NIR spectrometer pulse inertia force gas sensor wet etching oil detection glass welding spring design power consumption MEMS (micro-electro-mechanical system) back cavity deflection position detector magnetic MEMS single-layer SiO2 frequency tuning threshold accuracy suspended micro hotplate AlGaN/GaN circular HFETs quadrature modulation signal inertial switch nanoparticle sensor low noise photonic crystal nanobeam cavity floating slug infrared image backstepping approach microdroplet acceleration switch microgyroscope temperature uniformity methane microfluidic accelerometer design photonic crystal cavity anisotropy resonant frequency dual-mass MEMS gyroscope analytical model single crystal silicon temperature sensor micro fluidic refractive index sensor microwave measurement low zero-g offset femtosecond laser micropellistor rapid fabrication accelerometer tracking performance GaN diaphragm microactuator resistance parameter optomechanical sensor scanning grating mirror GaAs MMIC adaptive control frequency split frequency mismatch electrostatic force feedback thermoelectric power sensor squeeze-film damping silicon wideband Accelerometer readout bonding strength high temperature pressure sensors 3D simulation level-set method tetramethylammonium hydroxide (TMAH) thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues::TBX History of engineering and technology
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MEMS/NEMS Sensors: Fabrication and Application

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