Micro Electronic and Mechanical Systems
This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconduct...
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| Format: | Online |
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| Idioma: | anglès |
| Publicat: |
IntechOpen
2021
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| Matèries: | |
| Accés en línia: | ONIX_20210420_9789533070278_80 |
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