Micro Electronic and Mechanical Systems
This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconduct...
Salvato in:
| Natura: | Online |
|---|---|
| Lingua: | inglese |
| Pubblicazione: |
IntechOpen
2021
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| Soggetti: | |
| Accesso online: | ONIX_20210420_9789533070278_80 |
| Tags: |
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