Micro Electronic and Mechanical Systems

This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconduct...

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Natura: Online
Lingua:inglese
Pubblicazione: IntechOpen 2021
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Accesso online:ONIX_20210420_9789533070278_80
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