Micro Electronic and Mechanical Systems

This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconduct...

全面介紹

書目詳細資料

格式:	Online
語言:	英语
出版:	IntechOpen 2021
主題:	Electronics engineering thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TJ Electronics and communications engineering::TJF Electronics engineering
在線閱讀:	ONIX_20210420_9789533070278_80
標簽:	添加標簽 沒有標簽, 成為第一個標記此記錄!