Micro Electronic and Mechanical Systems
This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconduct...
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| 格式: | Online |
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| 語言: | 英语 |
| 出版: |
IntechOpen
2021
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| 主題: | |
| 在線閱讀: | ONIX_20210420_9789533070278_80 |
| 標簽: |
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| _version_ | 1869527019707957248 |
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| collection | Directory of Open Access Books |
| description | This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters. |
| format | Online |
| id | doab-20.500.12854ir-64724 |
| institution | Directory of Open Access Books |
| language | eng |
| publishDate | 2021 |
| publishDateRange | 2021 |
| publishDateSort | 2021 |
| publisher | IntechOpen |
| publisherStr | IntechOpen |
| record_format | ojs |
| spelling | doab-20.500.12854ir-647242024-04-11T20:35:27Z Micro Electronic and Mechanical Systems Takahata, Kenichi Electronics engineering thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TJ Electronics and communications engineering::TJF Electronics engineering This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters. 2021-04-20T14:54:12Z 2021-04-20T14:54:12Z 2009 book ONIX_20210420_9789533070278_80 9789533070278 9789535158479 https://directory.doabooks.org/handle/20.500.12854/64724 eng image/jpeg n/a https://www.intechopen.com/books https://mts.intechopen.com/storage/books/3333/authors_book/authors_book.pdf IntechOpen IntechOpen 10.5772/121 10.5772/121 78a36484-2c0c-47cb-ad67-2b9f5cd4a8f6 9789533070278 9789535158479 IntechOpen 526 open access |
| spellingShingle | Electronics engineering thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TJ Electronics and communications engineering::TJF Electronics engineering Micro Electronic and Mechanical Systems |
| title | Micro Electronic and Mechanical Systems |
| title_full | Micro Electronic and Mechanical Systems |
| title_fullStr | Micro Electronic and Mechanical Systems |
| title_full_unstemmed | Micro Electronic and Mechanical Systems |
| title_short | Micro Electronic and Mechanical Systems |
| title_sort | micro electronic and mechanical systems |
| topic | Electronics engineering thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TJ Electronics and communications engineering::TJF Electronics engineering |
| topic_facet | Electronics engineering thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TJ Electronics and communications engineering::TJF Electronics engineering |
| url | ONIX_20210420_9789533070278_80 |